Description
The UL3000 Fab Series are mobile helium leak detectors powered by ULTRATEST™ sensor technology, specifically designed to meet the demanding requirements of semiconductor and industrial leak detection. Available in two models — the UL3000 Fab and the UL3000 Fab ULTRA — both deliver fast startup, high sensitivity, and reliable results across a wide range of applications. The slim, maneuverable design allows for easy operation even in tight spaces, while the rotatable touchscreen display and wireless control capability make it simple to use for operators at any experience level.
Key Features
- Fast pump down times for quicker leak checking from atmospheric pressure
- HYDRO·S software (ULTRA) eliminates water vapor background for earlier, more sensitive measurements
- Rotatable full-color touchscreen display with graphical leak rate indication, viewable from a distance
- Wireless operation via smartphone or tablet — no special software or apps required
- I·CAL software for fast measurements in the 10⁻⁹ to 10⁻¹² mbar·l/s range
- I·ZERO 2.0 for intelligent background suppression while maintaining high measurement sensitivity
- Slim housing with low center of gravity and large wheels for easy maneuverability
- Rugged mass spectrometer with robust ion source and 3-year warranty
- Compatible with SMART-Spray helium spray gun, I·BOOST, and SPRAY-Check accessories
- Applicable for both vacuum and sniffer leak detection
- UL3000 Fab ULTRA: separate sniffer line port for SL3000 (up to 10m length)
Applications
- Semiconductor fabs
- Flat panel display manufacturing
- Solar cell fabrication
- Glass and web (roll-to-roll) coating
- General vacuum coating and applications
