Helium leak detector with integrated oil-sealed backing pump and 180° sector field mass spectrometer for accurate and reliable leak rate measurements.

Compact and mobile leak detector with a smallest detectable leak rate of 5x10-12mbarl*l/s. Highest measurement accuracy and reliability, very fast run up time and intuitive handling.


The perfect mobile leak detector for Research & Development, UHV applications, industrial applications or the semiconductor industry. With its small size the PHOENIX is perfectly suited for systems integration.

**Spare parts are non refundable and non returnable. Approximate 1-4 week lead time if unavailable in our inventory. Manufacturer lead times may vary.

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